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Agilis™ Piezo Motor Driven Linear Stages

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Overview

The Agilis^™ Piezo Motor linear stages are high precision miniature stages featuring Newport’s proprietary Agilis piezo motor. With ultra-high adjustment sensitivity, convenient programmable operation, and compact design, Agilis stages provide outstanding motion performance at the cost of a high quality manual stage.

Small minimum incremental motion
Set-and-forget stability when not in use
Ripple-free with low friction travel
Available with direct read encoder and CONEX controller
Available in vacuum compatible versions

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Products

Compare	Model	Compatibility	rankScore		Travel Range	Availability	Price	Brand
AG-LS25 Piezo Linear Stage, 12 mm travel $887 In Stock	AG-LS25 Piezo Linear Stage, 12 mm travel	UNIVERSAL	1.0	1.0	12 mm	In Stock	$887	Newport
AG-LS25-27 Piezo Linear Stage, 27 mm travel $1,251 In Stock	AG-LS25-27 Piezo Linear Stage, 27 mm travel	UNIVERSAL	1.0	2.0	27 mm	In Stock	$1,251	Newport
AG-LS25V6 Piezo Linear Stage, 12 mm travel, Vacuum Compatible $1,315 In Stock	AG-LS25V6 Piezo Linear Stage, 12 mm travel, Vacuum Compatible	UNIVERSAL	1.0	3.0	12 mm	In Stock	$1,315	Newport
AG-LS25-27V6 Piezo Linear Stage, 27 mm travel, Vacuum Compatible $1,744 In Stock	AG-LS25-27V6 Piezo Linear Stage, 27 mm travel, Vacuum Compatible	UNIVERSAL	1.0	4.0	27 mm	In Stock	$1,744	Newport

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Specifications

Models	AG-LS25	AG-LS25V6	AG-LS25-27	AG-LS25-27V6
Travel Range	12 mm	12 mm	27 mm	27 mm
Minimum Incremental Motion	50 nm	50 nm	100 nm	100 nm
Maximum Speed	0.5 mm/s	0.5 mm/s	0.5 mm/s	0.5 mm/s
Centered Load Capacity	3 N	3 N	2.5 N	2.5 N
Vertical Load Capacity	2 N	2 N	1.5 N	1.5 N
Holding Force	4 N	4 N	4 N	4 N
Vacuum Compatibility		10^-6 Torr		10^-6 Torr
Pitch	±100 µrad	±100 µrad	±100 µrad	±100 µrad
Yaw	±100 µrad	±100 µrad	±100 µrad	±100 µrad
Material	Stainless Steel	Stainless Steel	Stainless Steel	Stainless Steel
Cable Length	1.2 m	1.2 m	1.2 m	1.2 m
Operating Temperature	10 to 35°C	10 to 35°C	10 to 35°C	10 to 35°C
Weight	70 g	70 g	125 g	125 g

Specifications

Models	AG-LS25	AG-LS25V6	AG-LS25-27	AG-LS25-27V6
Travel Range	12 mm	12 mm	27 mm	27 mm
Minimum Incremental Motion	50 nm	50 nm	100 nm	100 nm
Maximum Speed	0.5 mm/s	0.5 mm/s	0.5 mm/s	0.5 mm/s
Centered Load Capacity	3 N	3 N	2.5 N	2.5 N
Vertical Load Capacity	2 N	2 N	1.5 N	1.5 N
Holding Force	4 N	4 N	4 N	4 N
Vacuum Compatibility		10^-6 Torr		10^-6 Torr
Pitch	±100 µrad	±100 µrad	±100 µrad	±100 µrad
Yaw	±100 µrad	±100 µrad	±100 µrad	±100 µrad
Material	Stainless Steel	Stainless Steel	Stainless Steel	Stainless Steel
Cable Length	1.2 m	1.2 m	1.2 m	1.2 m
Operating Temperature	10 to 35°C	10 to 35°C	10 to 35°C	10 to 35°C
Weight	70 g	70 g	125 g	125 g

Features

Multi-Axis Stage Configurations

Agilis™ piezo motor linear stages can be configured as XY, XZ, or XYZ stage stacks. You can use the 339233 90 degree angle bracket for building XZ and XYZ stage configurations. For XY stage assemblies of AG-LS25 stages, use the 4 x TC M3x4 screws supplied with each stage. An XZ stage stack is shown.

Integrated Linear Encoder with CONEX Controller Version

Newport also offers a version of the 27-mm travel Agilis linear stage with a built-in direct read linear encoder and integrated CONEX controller, the CONEX-AG-LS25-27P. Its closed-loop control provides a typical bi-directional repeatability of 0.2 µm and 0.2 µm minimum incremental motion.

50 nm Minimum Incremental Motion

The Agilis proprietary piezo technology provides 50 nm incremental motion capability, making them ideal for ultra-sensitive alignments and adjustments.

Vacuum Compatible Versions

The Agilis linear stages are available in vacuum compatible versions which can be used in vacuum (10^-6 Torr) environments.

Set-and-Forget Long-Term Stability

The Agilis piezo motor is directly coupled to the moving carriage with no intermediate screw or gear, avoiding problems with coupling in drivetrain. When idle, the holding force of the motor locks the position for true set-and-forget long-term stability.

Ripple-Free and Low Friction Travel

The thermally matched stainless steel design and precision manufactured bearing surfaces of the Agilis linear stage provide ripple-free, low friction linear travel and angular deviations better than 100 µrad in any axis.