Piezo Linear Stage, 12 mm travel, Vacuum Compatible

The AG-LS25V6 is the vacuum compatible version of the AG-LS25 piezo motor driven linear stage and is rated for 10^-6 Torr. The AG-LS25V6 features 12 mm travel and precision motion is achieved by calibrated, pre-stressed linear ball bearings. The thermally matched stainless steel design and precision manufactured bearing surfaces provide ripple-free, low friction linear travel and angular deviations better than 200 µrad in any axis.
Use with either the Agilis™ AG-UC2 handheld, AG-UC8 or AG-UC8PC controllers.
Note: The connector supplied with the stage is not vacuum compatible due to various feed-through configurations and customer preferences. Please contact Newport for vacuum compatible connector options.

Multi-Axis Stage Configurations

Agilis™ piezo motor linear stages can be configured as XY, XZ, or XYZ stage stacks. You can use the , 90 degree angle bracket for building XZ and XYZ stage configurations. Attention this bracket is not compatible with the AG-LS25-27 (as Z-axis). For XY stage assemblies of AG-LS25 stages, use the 4 x TC M3x4 screws supplied with each stage. The AG-LS25-27 & AG-LS25-27V6 must be positioned at the bottom of the stack (X-axis). The AG-LS25 & AG-LS25V6 stages can be stacked on top of the AG-LS25-27(V6) as the Y-axis, or as the Z-axis using the 339233, 90 degree angle bracket. Please note that the 339233, 90 degree angle bracket, is anodized and not vacuum compatible. An XZ stage stack is shown.

50 nm Minimum Incremental Motion

The Agilis proprietary piezo technology provides 50 nm incremental motion capability, making them ideal for ultra-sensitive alignments and adjustments.

Vacuum Compatible Versions

The Agilis linear stages are available in vacuum compatible versions which can be used in vacuum (10^-6 Torr) environments.

Set-and-Forget Long-Term Stability

The Agilis piezo motor is directly coupled to the moving carriage with no intermediate screw or gear, avoiding problems with coupling in drivetrain. When idle, the holding force of the motor locks the position for true set-and-forget long-term stability.

Ripple-Free and Low Friction Travel

The thermally matched stainless steel design and precision manufactured bearing surfaces of the Agilis linear stage provide ripple-free, low friction linear travel and angular deviations better than 100 µrad in any axis.

Specifications

Technical Specs

Travel Range
12 mm
Axes of Travel
X
Maximum Speed
0.5 mm/s
Minimum Incremental Motion
50 nm
Centered Load Capacity
3 N
Vertical Load Capacity
2 N
Holding Force
4 N
Bearings
Ball Bearings
Material
Stainless Steel

Cable Length
1.2 m
Vacuum Compatibility
10^-6 Torr
Limit Switches
Proprietary electrical switches
Pitch
±100 µrad
Yaw
±100 µrad
Weight
70 g
Operating Temperature
10 to 35°C

Travel Range
12 mm
Axes of Travel
X
Maximum Speed
0.5 mm/s
Minimum Incremental Motion
50 nm
Centered Load Capacity
3 N
Vertical Load Capacity
2 N
Holding Force
4 N
Bearings
Ball Bearings
Material
Stainless Steel

Cable Length
1.2 m
Vacuum Compatibility
10^-6 Torr
Limit Switches
Proprietary electrical switches
Pitch
±100 µrad
Yaw
±100 µrad
Weight
70 g
Operating Temperature
10 to 35°C

Resources & Downloads

Literature

Agilis™ Series Piezo Motor Driven Positioners(1.7 MB, PDF)
Vaccum Compatible Products Brochure(3.8 MB, PDF)

2D Product Drawings

AG-LS25-S(204.4 kB, PDF)

Manuals

Agilis Piezo Motor Driven Components User Manual(2.6 MB, PDF)

Related Products

Similar

	Compare	Description	Compatibility	Drawings, CAD & Specs	Avail.	Price
		NPX200SGV6Piezo Liner Stage, 200 µm Nanopositioning, Strain-gauge, Vacuum	UNIVERSAL		Contact Us	$4,864
		MFA-CCV6Motorized Linear Stage, Miniature, 25 mm Travel, DC Motor, Vacuum Compatible	UNIVERSAL		In Stock	$3,967

Compatible

Description	Compatibility	Avail.	Price
AG-UC2Motor Controller, Piezo, 2 Axis, Agilis™, Hand-held	UNIVERSAL	In Stock	$598
AG-UC8Motor Controller, Piezo, 8 Axis, Agilis™	UNIVERSAL	In Stock FREE 2-day shipping on thousands of products on Newport.com Learn More	$1,098
AG-UC8PCMotor Controller, Piezo, 8-Axis, Agilis™, OEM, USB/RS232/RS485	UNIVERSAL	Contact Us	$1,006

Frequently Purchased Together

	Compare	Description	Compatibility	Drawings, CAD & Specs	Avail.	Price
		AG-UC8Motor Controller, Piezo, 8 Axis, Agilis™	UNIVERSAL		In Stock FREE 2-day shipping on thousands of products on Newport.com Learn More	$1,098
		AG-UC2-OEMMotor Controller, Piezo, 2 Axis, Agilis™, PCB-Mountable	UNIVERSAL		In Stock FREE 2-day shipping on thousands of products on Newport.com Learn More	$584

Need help?

Contact an Applications Specialist by sending us an email