Piezo Liner Stage, 200 µm Nanopositioning, Strain-gauge, Vacuum

Specifications

  • Travel Range
    0.2 mm  
  • Axes of Travel
    X
  • Axial Load Capacity
    16 N
  • Vertical Load Capacity
    10 N  
  • Pull Force
    34 N
  • Push Force
    340 N
  • Nonlinearity
    0.06%
  • Axial Stiffness
    0.08 N/µm
  • Feedback
    Strain-gauge
  • Cable Length
    2 m
  • Vacuum Compatibility
    10-6 Torr
  • Capacitance
    1.8 µF  
  • Closed Loop Resolution
    4 nm  
  • Closed Loop Travel
    160 µm  
  • Open Loop Resolution
    0.4 nm  
  • Open Loop Travel
    200 µm  
  • Resonant Frequency, Unloaded
    177 Hz
  • Weight
    180 g  
  • RoHS
    Compliant

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