Piezo Liner Stage, 200 µm Nanopositioning, Strain-gauge, Vacuum

The NPX200SGV6 Vacuum Compatible Nanopositioning Linear Stage is a 200 µm travel piezo-based linear stage providing nanometer resolution motion in the X axis. It is ideally suited for nanopositioning of small components such as mirrors, fibers, laser diodes, micro-optics, sensors, or cellular samples. Applications include optical delay lines, path length changes of interferometers, laser lithography, scanning microscopy, and patch-clamping, among others. NPX stages feature highly reliable, multi-layer, low-voltage piezoelectric transducer (PZT) stacks for high-duty cycle operations. A sophisticated, FEA-optimized, parallelogram solid state flexure guide system ensures perfect parallel motion. Due to the frictionless guide, NPX stages are maintenance-free, are not subject to wear and provide rapid response and fast settling performance making them suitable for use in dynamic processes such as high-frequency error compensation, tracking, fast stepping or continuous scanning.
The closed-loop version features a high res strain-gauge position sensor for highly accurate and repeatable motion, that also compensates for actuator creep. The sensors are built in a full Wheatstone bridge design. It can be operated in either open or closed-loop control. Fastening is easy with a number of threads and alignment pin holes at the top and bottom plates. For mounting to optical tables, use adapter plate NPX-BP. Like with all piezo flexure devices, excessive moment loads and side forces acting between the top plate and the housing should be avoided during fastening.
Use with the NPC3SG Nanopositioning Amplifier.
Resources & Downloads
Literature
NPX Data Sheet(1.6 MB, PDF) Vaccum Compatible Products Brochure(3.8 MB, PDF) Vaccum Compatible Products Brochure(3.8 MB, PDF)
2D Product Drawings
NPX Series-S(85.9 kB, PDF)
Manuals
NanoPositioning NPX & PSM User's Manual(139.7 kB, PDF) NPC & NPCSG Series Amplifiers User's Manual(1 MB, PDF)
Technical Notes
Resonant Frequency Tech Note(78.4 kB, PDF)
Related Products
Accessories
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
![]() | NPX-BPBase Plate, Nanopositioning Translation Stages |
Similar
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
![]() | NPXY100SGV6XY Piezo Linear Stage, 100 µm Nano-Positioning, Strain-gauge, Vacuum | |||||
![]() | NPX200SGNanopositioning Stage, 200 µm, Strain-gauge | In Stock | ||||
![]() | NPXYZ100SGV6XYZ Piezo Linear Stage, 100 µm Nanopositioning, Strain-gauge, Vacuum | |||||
![]() | NPX200Piezo Linear Stage, 200 µm Nano-Positioning, Open-loop | |||||
![]() | AG-LS25V6Piezo Linear Stage, 12 mm travel, Vacuum Compatible | In Stock FREE 2-day shipping on thousands of products on Newport.com Learn More | ||||
![]() | NPX400SGNanopositioning Stage, 400 µm, Strain-gauge |







