Motorized Vertical Stage, High Precision, 30 mm Travel, GTS Series

High Precision, Vertical Stages, GTS Series

The GTS30V is a compact, vertical stage that combines outstanding trajectory accuracy with fine adjustment capability of 0.1 μm Minimum Incremental Motion with a travel range of 30 mm. Features include: a vertical guide system composed of matched pairs of anti-creep crossed roller bearings resulting in high-precision, ripple-free motion, a folded DC motor with a precision ground and a low-friction lead screw designed to deliver ultra-smooth motion. The GTS30V also does not back drive even with heavy loads, offering excellent in-position stability. A reduction belt between the motor and lead screw increases available output torque and robustness for servo loop sensitivity. The GTS30V is ideal for applications such as semiconductor wafer inspection, scanning, microscopy, laser machining, automated device alignment, metrology, quality control and applications requiring long travel vertical motion of 30 mm.

Direct Vertical Guiding

High-precision vertical motion is achieved using a direct vertical guiding system composed of matched pairs of anti-creep crossed roller bearings for the GTS30V and recirculating ball bearings for GTS70V. These linear guides were chosen to provide the straightest trajectory, smooth and precise motion and robust, long term operation. Additionally, the crossed roller bearings in GTS30V have the added advantage of more quiet, ripple-free motion, which is important in metrology level applications.

Crossed Roller Bearings

High Efficiency Drive Train

A folded DC motor with a precision ground, low-friction lead screw delivers ultra-smooth motion even at high loads. A reduction belt between the motor and the lead screw increases the available output torque and reduces servo sensitivity, ensuring 100 nm MIM.

Direct Position Feedback

Precision position feedback is supplied by a linear scale encoder, which contributes to sub-micron MIM and makes the GTS-V less susceptible to hysteresis. The direct read encoder system is impervious to position drift caused by motion-induced heating of the lead screw for improved accuracy and repeatability. For higher load applications, the GTS70VCC with a motor-mounted rotary encoder is recommended.

Plug and Play - ESP Compatible

All GTS-V stages are ESP-compatible. When connected to a Newport controller, they are quickly recognized and their operating parameters are configured without the need for user input. This Plug and Play feature is not only transparent to the user, but it also ensures the safe operation of the stage.

Manual Knob

The manual knob is convenient when the power is off and when quick and coarse adjustment is needed.

Multi-Axis Stage Assemblies

When combined with Newport motorized linear and rotation stages, the GTS-V vertical stage is a space-saving alternative to traditional stacks of stages and provides unobstructed access to the payload from any side. Furthermore, centering the payload over the bearings ensures less cantilevering load effects and Abbe induced motion errors.

ILS250, GTS30V and URS100 stages for an XZ-Θz Assembly

Specifications

Technical Specs

Travel Range
30 mm
Minimum Incremental Motion
0.10 µm
Maximum Speed
10 mm/s
Centered Load Capacity
40 N
Accuracy, Typical
±0.37 µm
Accuracy, Guaranteed
±0.75 µm
Bi-directional Repeatability, Typical
±0.07 µm
Bi-directional Repeatability, Guaranteed
±0.10 µm
Drive Screw Pitch
1 mm
Encoder Resolution
0.050 µm
Limit Switches
Optical
Origin
Optical, close to lower limit
Origin Repeatability
±0.05 µm
Connectors
DB25 Male
Pitch, Typical
±20 µrad

Pitch, Guaranteed
±25 µrad
Compliance in Pitch
40 µrad/Nm
Roll, Typical
±12 µrad
Roll, Guaranteed
±25 µrad
Compliance in Roll
40 µrad/Nm
Compliance in Yaw
25 µrad/Nm
Flatness Typical (Guaranteed)
±0.75 µm
Straightness Typical (Guaranteed)
±0.75 µm
Cable Length
3 m
Thread Type
M4 and M6
Weight
3.3 kg
MTBF
20,000 h (25% load, 10% duty cycle)
Compliance
RoHS 3, CE

Travel Range
30 mm
Minimum Incremental Motion
0.10 µm
Maximum Speed
10 mm/s
Centered Load Capacity
40 N
Accuracy, Typical
±0.37 µm
Accuracy, Guaranteed
±0.75 µm
Bi-directional Repeatability, Typical
±0.07 µm
Bi-directional Repeatability, Guaranteed
±0.10 µm
Drive Screw Pitch
1 mm
Encoder Resolution
0.050 µm
Limit Switches
Optical
Origin
Optical, close to lower limit
Origin Repeatability
±0.05 µm
Connectors
DB25 Male
Pitch, Typical
±20 µrad

Pitch, Guaranteed
±25 µrad
Compliance in Pitch
40 µrad/Nm
Roll, Typical
±12 µrad
Roll, Guaranteed
±25 µrad
Compliance in Roll
40 µrad/Nm
Compliance in Yaw
25 µrad/Nm
Flatness Typical (Guaranteed)
±0.75 µm
Straightness Typical (Guaranteed)
±0.75 µm
Cable Length
3 m
Thread Type
M4 and M6
Weight
3.3 kg
MTBF
20,000 h (25% load, 10% duty cycle)
Compliance
RoHS 3, CE

Resources & Downloads

3D Product Models

Download CAD Files

Application Notes

Fiber Spool Winding Application with Custom 5-Axis Motion System(145.1 kB, PDF)
Ultrafast Laser Micromachining with Newport XYZ Motion System(393.9 kB, PDF)
Three-Dimensional Microfabrication by Two-Photon Polymerization(932.1 kB, PDF)
Workstation for Laser Direct-Write Processing(4.4 MB, PDF)

2D Product Drawings

GTS30V(425.9 kB, PDF)

Literature

GTS-V Data Sheet.pdf(903.8 kB, PDF)

Manuals

GTS-V -User Manual.pdf(1.1 MB, PDF)

Related Products

Compatible Controllers

Based on axis required, choose a specific controller to pair with the stage. Along with an XPS-D or XPS-RLD controller, a driver module is required.

Description	Compatibility	Avail.	Price
XPS-D Universal High-Performance 1-8 Axis Motion Controller and Driver¹XPS-D Universal High-Performance 1-8 Axis Motion Controller and Driver	UNIVERSAL
XPS-RLD Universal High-Performance 1-4 Axis Motion Controller and Driver²XPS-RLD Universal High-Performance 1-4 Axis Motion Controller and Driver	UNIVERSAL
ESP302 3-Axis DC and Stepper Motion ControllerESP302 3-Axis DC and Stepper Motion Controller	UNIVERSAL
SMC100CCMotion Controller, Single-axis DC Motor	UNIVERSAL	Contact Us FREE 2-day shipping on thousands of products on Newport.com Learn More	$1,452

Notes:

Requires XPS-DRV11 driver module
Requires XPS-DRV11 driver module

Accessories

	Compare	Description	Compatibility	Drawings, CAD & Specs	Avail.	Price
		MMCABLE-REGInline Regulator, 5 VDC, for MMCABLEs 5 m or longer	UNIVERSAL		In Stock	$252
		M-FK-BLXL-Allen Wrench Set, Sizes: 1.5, 2, 2.5, 3, 4, 5, 6, 8, 10 mm, Metric	METRIC		In Stock FREE 2-day shipping on thousands of products on Newport.com Learn More	$37

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Description	Compatibility	Avail.	Price
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GTS70VMotorized Vertical Stage, High Precision, 70 mm Travel, Linear Encoder	UNIVERSAL	Contact Us	$11,933
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Frequently Purchased Together

Description	Compatibility	Avail.	Price
XPS-DRV11Motion Controller Card, Universal, Stepper, DC, and Linear Motors	UNIVERSAL	In Stock FREE 2-day shipping on thousands of products on Newport.com Learn More	$865
XPS-DK22Cable Kit, For Stages IMS-LM-S, XM-S, and XPS-DRV11 Driver	UNIVERSAL	In Stock	$493
XPS-D4Universal Motion Controller, High Performance, 4-axis, Ethernet	UNIVERSAL	In Stock	$9,906
XMS160-SMotorized Linear Stage, Linear Motor, 160 mm Travel, 100 N Load, M4 and M6	UNIVERSAL	In Stock	$12,773