Motorized Vertical Stage, Compact, 4.8 mm, DC Servo with Tachometer, 4-40 and 8-32
Motorized Vertical Stage, Compact, 4.8 mm, DC Servo with Tachometer, 4-40 and 8-32
Model: VP-5ZA
Product Series Overview
Precision Vertical Stages, VP SeriesThe VP-5ZA vertical stage is an ultra-low profile, precision vertical stage with minimum incremental motion capability of 60 nm, high-responsiveness and perfectly straight trajectory over 4.8 mm travel. Features include: an innovative inclined-plane design; a cool running, high torque DC motor with a precision preloaded, long-life, ball screw ensuring high speed motion with minimum settling time; a high-resolution linear scale directly attached to the moving rail, eliminating all drive-train induced motion errors; and two pairs of vertically mounted double-row linear ball bearing slides resulting in pure vertical motion. A standard 3-point mounting interface for a wafer chuck is provided as well. Manual vertical adjustments can be made using a flat screw driver for convenience. Typical applications include: semiconductor wafer inspection, photonics test and packaging, micro-assembly, precision metrology, and surface inspection systems. The VP-5ZA is compatible with the VP-25X linear stages and other Newport positioning products. For mounting to optical tables or to the ILS linear stages, use the optional base plate VP-BP.
Build Low Profile XYZ Stage Stacks
Ultra low-profile precision XYZ system consisting of two VP-25XA linear stages and one VP-5ZA vertical translation stage. Compared to traditional stacks of stages, this solution offers a lower-profile alternative with easy access to the load from any direction.
Keep Payload Over the Bearings
The lifting approach of the VP-5ZA allows centering of the payload over the bearings and close to the position feedback. This avoids any cantilevered loads that cause angular deformations and results in more precise motion with a higher load capacity.
A VP-5ZA stage mounted on top of an ILS High-Performance Mid-Range Travel Linear Stage with optional VP-BP base plate.
Efficient Inclined Plane Design
Using a unique arrangement of two wedges which move past each other via inclined, recirculating ball bearings and 2 pairs of vertically mounted double-row linear ball bearing slides result in pure vertical motion.
Broad Stage Compatibility
A pattern of threaded holes on the top plate provides compatibility with the VP-25X linear stages and other Newport positioning products. A standard 3-point mounting interface for a wafer chuck is provided as well. For mounting the VP-5ZA to optical tables or to the ILS linear stages, use the optional base plate VP-BP. Manual vertical adjustments can be conveniently made using a flat screw driver.
High Torque DC Motor
An efficient, high torque DC motor with a precision preloaded, long-life, ball screw ensures high speed motion with minimum settling time. A high-resolution linear scale is directly attached to the moving rail, eliminating all drive-train induced motion errors. In addition, the space-saving, fixed read head design avoids any moving cables. The result is a robust and long lasting stage with an MTBF of 20,000 hours.
Specifications
- Travel Range4.8 mm
- Minimum Incremental Motion0.06 µm
- Maximum Speed5 mm/s
- Centered Load Capacity50 N
- Accuracy, Typical±0.6 µm
- Accuracy, Guaranteed±1.5 µm
- Bi-directional Repeatability, Typical±0.10 µm
- Bi-directional Repeatability, Guaranteed±0.25 µm
- Uni-directional Repeatability, Typical±0.06 µm
- Uni-directional Repeatability, Guaranteed±0.15 µm
- Drive Screw Pitch1 mm
- Encoder Resolution0.0196 µm
- Limit SwitchesOptical
- OriginOptical, centered
- Origin Repeatability±0.1 µm
- ConnectorsDB25 Male
- Pitch, Typical±30 µrad
- Pitch, Guaranteed±50 µrad
- Compliance in Pitch45 µrad/Nm
- Roll, Typical±30 µrad
- Roll, Guaranteed±100 µrad
- Compliance in Roll50 µrad/Nm
- Yaw, Typical±30 µrad
- Yaw, Guaranteed±50 µrad
- Compliance in Yaw10 µrad/Nm
- Cable Length1.5 m
- Thread Type4-40 and 8-32
- Weight2.4 kg
- MTBF20,000 h (25% load, 10% duty cycle)
- ComplianceRoHS 3, CE
Resources & Downloads
3D Product Models
Application Notes
A Diamond in the Rough: Industrial Diamond Cutting and Processing with a 4-Axis Precision Motion System(517.1 kB, PDF) Workstation for Laser Direct-Write Processing(4.4 MB, PDF) Building a High Performance Non-contact Optical Surface Metrology System(400.4 kB, PDF) Three-Dimensional Microfabrication by Two-Photon Polymerization(932.1 kB, PDF)
2D Product Drawings
VP-5ZA-S(135.4 kB, PDF) VP-5ZA_M4M6-S(56.9 kB, PDF)
Manuals
VP-5ZA Vertical Linear Stage User's Manual(1.5 MB, PDF)
Literature
VP-5ZA Data Sheet.pdf(1.7 MB, PDF)
Related Products
Compatible Controllers
Based on axis required, choose a specific controller to pair with the stage. Along with an XPS-D or XPS-RLD controller, a driver module is required.
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | XPS-D Universal High-Performance 1-8 Axis Motion Controller and Driver1XPS-D Universal High-Performance 1-8 Axis Motion Controller and Driver | |||||
 | XPS-RLD Universal High-Performance 1-4 Axis Motion Controller and Driver2XPS-RLD Universal High-Performance 1-4 Axis Motion Controller and Driver | |||||
 | ESP302 3-Axis DC and Stepper Motion ControllerESP302 3-Axis DC and Stepper Motion Controller | |||||
 | SMC100CCMotion Controller, Single-axis DC Motor | FREE 2-day shipping on thousands of products on Newport.com Learn More |
Notes:
- Requires XPS-DRV11 driver module
- Requires XPS-DRV11 driver module
Similar
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | GTS30VMotorized Vertical Stage, High Precision, 30 mm Travel, GTS Series | In Stock FREE 2-day shipping on thousands of products on Newport.com Learn More | ||||
 | UZS80CCMotorized Vertical Stage, 4.5 mm Travel, DC Drive, 30 N Load, M4 | 10 Weeks |