Motorized Vertical Stage, Compact, 4.8 mm, DC Servo with Tachometer, M3 and M4

The M-VP-5ZA vertical stage is an ultra-low profile, precision vertical stage with minimum incremental motion capability of 60 nm, high-responsiveness and perfectly straight trajectory over 4.8 mm travel. Features include: an innovative inclined-plane design; a cool running, high torque DC motor with a precision preloaded, long-life, ball screw ensuring high speed motion with minimum settling time; a high-resolution linear scale directly attached to the moving rail, eliminating all drive-train induced motion errors; and two pairs of vertically mounted double-row linear ball bearing slides resulting in pure vertical motion. A standard 3-point mounting interface for a wafer chuck is provided as well. Manual vertical adjustments can be made using a flat screw driver for convenience. Typical applications include: semiconductor wafer inspection, photonics test and packaging, micro-assembly, precision metrology, and surface inspection systems. The VP-5ZA is compatible with the VP-25X linear stages and other Newport positioning products. For mounting to optical tables or to the ILS linear stages, use the optional base plate VP-BP.

Build Low Profile XYZ Stage Stacks

Ultra low-profile precision XYZ system consisting of two VP-25XA linear stages and one VP-5ZA vertical translation stage. Compared to traditional stacks of stages, this solution offers a lower-profile alternative with easy access to the load from any direction.

Keep Payload Over the Bearings

The lifting approach of the VP-5ZA allows centering of the payload over the bearings and close to the position feedback. This avoids any cantilevered loads that cause angular deformations and results in more precise motion with a higher load capacity.

A VP-5ZA stage mounted on top of an ILS High-Performance Mid-Range Travel Linear Stage with optional VP-BP base plate.

Efficient Inclined Plane Design

Using a unique arrangement of two wedges which move past each other via inclined, recirculating ball bearings and 2 pairs of vertically mounted double-row linear ball bearing slides result in pure vertical motion.

Broad Stage Compatibility

A pattern of threaded holes on the top plate provides compatibility with the VP-25X linear stages and other Newport positioning products. A standard 3-point mounting interface for a wafer chuck is provided as well. For mounting the VP-5ZA to optical tables or to the ILS linear stages, use the optional base plate VP-BP. Manual vertical adjustments can be conveniently made using a flat screw driver.

High Torque DC Motor

An efficient, high torque DC motor with a precision preloaded, long-life, ball screw ensures high speed motion with minimum settling time. A high-resolution linear scale is directly attached to the moving rail, eliminating all drive-train induced motion errors. In addition, the space-saving, fixed read head design avoids any moving cables. The result is a robust and long lasting stage with an MTBF of 20,000 hours.

Specifications

Technical Specs

Travel Range
4.8 mm
Minimum Incremental Motion
0.06 µm
Maximum Speed
5 mm/s
Centered Load Capacity
50 N
Accuracy, Typical
±0.6 µm
Accuracy, Guaranteed
±1.5 µm
Bi-directional Repeatability, Typical
±0.10 µm
Bi-directional Repeatability, Guaranteed
±0.25 µm
Uni-directional Repeatability, Typical
±0.06 µm
Uni-directional Repeatability, Guaranteed
±0.15 µm
Drive Screw Pitch
1 mm
Encoder Resolution
0.0196 µm
Limit Switches
Optical
Origin
Optical, centered
Origin Repeatability
±0.1 µm
Connectors
DB25 Male

Pitch, Typical
±30 µrad
Pitch, Guaranteed
±50 µrad
Compliance in Pitch
45 µrad/Nm
Roll, Typical
±30 µrad
Roll, Guaranteed
±50 µrad
Compliance in Roll
50 µrad/Nm
Yaw, Typical
±30 µrad
Yaw, Guaranteed
±50 µrad
Compliance in Yaw
10 µrad/Nm
Cable Length
1.5 m
Thread Type
M3 and M4
Weight
2.4 kg
MTBF
20,000 h (25% load, 10% duty cycle)
Compliance
RoHS 3, CE

Travel Range
4.8 mm
Minimum Incremental Motion
0.06 µm
Maximum Speed
5 mm/s
Centered Load Capacity
50 N
Accuracy, Typical
±0.6 µm
Accuracy, Guaranteed
±1.5 µm
Bi-directional Repeatability, Typical
±0.10 µm
Bi-directional Repeatability, Guaranteed
±0.25 µm
Uni-directional Repeatability, Typical
±0.06 µm
Uni-directional Repeatability, Guaranteed
±0.15 µm
Drive Screw Pitch
1 mm
Encoder Resolution
0.0196 µm
Limit Switches
Optical
Origin
Optical, centered
Origin Repeatability
±0.1 µm
Connectors
DB25 Male

Pitch, Typical
±30 µrad
Pitch, Guaranteed
±50 µrad
Compliance in Pitch
45 µrad/Nm
Roll, Typical
±30 µrad
Roll, Guaranteed
±50 µrad
Compliance in Roll
50 µrad/Nm
Yaw, Typical
±30 µrad
Yaw, Guaranteed
±50 µrad
Compliance in Yaw
10 µrad/Nm
Cable Length
1.5 m
Thread Type
M3 and M4
Weight
2.4 kg
MTBF
20,000 h (25% load, 10% duty cycle)
Compliance
RoHS 3, CE

Resources & Downloads

Application Notes

Three-Dimensional Microfabrication by Two-Photon Polymerization(932.1 kB, PDF)
Workstation for Laser Direct-Write Processing(4.4 MB, PDF)

2D Product Drawings

VP-5ZA-S(135.4 kB, PDF)
VP-5ZA_M4M6-S(56.9 kB, PDF)

Manuals

VP-5ZA Vertical Linear Stage User's Manual(1.5 MB, PDF)

Literature

VP-5ZA Data Sheet.pdf(1.7 MB, PDF)

Related Products

Compatible Controllers

Based on axis required, choose a specific controller to pair with the stage. Along with an XPS-D or XPS-RLD controller, a driver module is required.

Description	Compatibility	Avail.	Price
xps-d-universal-motion-controller¹XPS-D Universal High-Performance 1-8 Axis Motion Controller and Driver	UNIVERSAL
xps-rl-universal-high-performance-motion-controller²XPS-RLD Universal High-Performance 1-4 Axis Motion Controller and Driver	UNIVERSAL
esp301-3-axis-dc-and-stepper-motion-controllerESP302 3-Axis DC and Stepper Motion Controller	UNIVERSAL
SMC100CCMotion Controller, Single-axis DC Motor	UNIVERSAL	In Stock FREE 2-day shipping on thousands of products on Newport.com Learn More	$1,452

Notes:

Requires XPS-DRV11 driver module
Requires XPS-DRV11 driver module

Accessories

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Frequently Purchased Together

Description	Compatibility	Avail.	Price
XPS-DRV11Motion Controller Card, Universal, Stepper, DC, and Linear Motors	UNIVERSAL	In Stock FREE 2-day shipping on thousands of products on Newport.com Learn More	$865
XPS-DK22Cable Kit, For Stages IMS-LM-S, XM-S, and XPS-DRV11 Driver	UNIVERSAL	In Stock	$493
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XMS100-SMotorized Linear Stage, Linear Motor, 100 mm Travel, 100 N Load, M4 and M6	UNIVERSAL	In Stock	$11,314
VP-BPUniversal Base Plate, VP Series Stages	UNIVERSAL	In Stock FREE 2-day shipping on thousands of products on Newport.com Learn More	$279