Motorized Vertical Stage, Ultra-Precision Linear Motor, 50 mm, 100 N

Specifications

  • Travel Range
    50 mm  
  • Minimum Incremental Motion
    0.05 µm
  • Maximum Speed
    300 mm/s
  • Centered Load Capacity
    100 N
  • Accuracy, Guaranteed
    ± 0.75 µm
  • Bi-directional Repeatability, Guaranteed
    ± 0.05 µm
  • Limit Switches
    Optical, fiducial on encoder
  • Origin
    Optical, at center of travel, including mechanical zero signal
  • Compliance in Pitch
    2.5 µrad/Nm  
  • Compliance in Roll
    2.0 µrad/Nm  
  • Compliance in Yaw
    3.5 µrad/Nm  
  • Straightness, Flatness
    ± 0.75 µm
  • Cable Length
    5 m  
  • Weight
    3.5 kg
  • MTBF
    20,000 h
  • Compliance
    RoHS 3, CE

Related Products

Compatible controllers

Based on axis required, choose a specific XPS-D or XPS-RLD controller to pair with the stage.
Along with the controller, a driver module and a cable kit are required. See the options below.
Compare Description Drawings, CAD & Specs Avail. Price
XPS-D Universal High-Performance 1-8 Axis Motion Controller and DriverXPS-D Universal High-Performance 1-8 Axis Motion Controller and DriverXPS-D Universal High-Performance 1-8 Axis Motion Controller and Driver
XPS-RLD Universal High-Performance 1-4 Axis Motion Controller and DriverXPS-RLD Universal High-Performance 1-4 Axis Motion Controller and DriverXPS-RLD Universal High-Performance 1-4 Axis Motion Controller and Driver

Universal XPS-DRV11 driver

Compare Description Drawings, CAD & Specs Avail. Price
XPS Motion Controller Driver ModulesXPS-DRV11Motion Controller Card, Universal, Stepper, DC, and Linear Motors
In Stock
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products on Newport.com Learn More
$865
XPS Motion Controller to Stage Cable KitsXPS-DK22Cable Kit, For Stages IMS-LM-S, XM-S, and XPS-DRV11 Driver
In Stock
$493

Legacy XPS-DRV02 driver

Compare Description Drawings, CAD & Specs Avail. Price
XPS Motion Controller Driver ModulesXPS-DRV02PWM Drive Module, Brushless Motors
In Stock
$1,353
XPS Motion Controller to Stage Cable KitsXPS-DK27Cable Kit, For Stages IMS-LM-S, XM-S, and XPS-DRV02 Driver$454

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