Air Bearing Stage, SinguLYS B-1200

SinguLYS - Single Axis Air Bearing Stage

The Proprietary SiC ceramic beam used in the SinguLYS B-Series Bridge is 3 times lighter than steel and offers triple the stiffness of granite. These properties have allowed our customers to increase throughput in current and next-generation Flat Panel Display Inspection tools. The light and rigid pressure-vacuum air bearing carriage accomodates high (10 kg) cantilevered payloads and significantly reduces contamination to the payload below. Besides cleanliness, the frictionless design eliminates the need for mechanical bearing maintenance/lubrication.

Specifications

Technical Specs

Bearings
Vacuum/pressure air bearing
Drive Type
Ironcore linear motor
Maximum Acceleration
2 G
Maximum Speed
2.5 m/s
On-Axis Accuracy
± 0.5 µm
Pitch
20 µrad

Roll
20 µrad
Yaw
20 µrad
Travel Range
1200 mm

Bearings
Vacuum/pressure air bearing
Drive Type
Ironcore linear motor
Maximum Acceleration
2 G
Maximum Speed
2.5 m/s
On-Axis Accuracy
± 0.5 µm
Pitch
20 µrad

Roll
20 µrad
Yaw
20 µrad
Travel Range
1200 mm

Resources & Downloads

Literature

High Performance Air Bearing Stage Capabilities and Solutions(11.9 MB, PDF)

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