Air Bearing Stage, High-Throughput, DynamYX® GT
The DynamYX® GT air-bearing stage is intended for high-throughput applications with aggressive duty-cycles. Featuring an extremely rigid structure and high load capacity air bearings, it provides up to 2G acceleration. The DynamYX GT also has high-efficiency X and Y linear motors with integrated cooling drive moving masses through the respective CG's. It is also available with Newport’s patented ZT3, Z-Tip-Tilt-Theta stage
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