Air Bearing Stage, Reticle Positioning, DynamYX^® RS

The DynamYX^® RS Reticle Positioning Stage is designed for reticle inspection and repair applications. It features an extremely rigid ceramic reticle holder that is mounted to a single plane air bearing carriage. The cantilevered substrate is located away from all moving elements of the stage, which ensures the cleanest possible environment. The DynamYX RS Reticle Positioning Stage also has a full-open-aperture that accommodates flexible optical component integration as well as ease of service access and is much smaller than traditional open-frame solutions.