Motorized Actuator, High Speed, 50 mm Travel, Vacuum Compatible

Specifications

  • Travel Range
    50 mm
  • Maximum Speed
    0.5 mm/s  
  • Minimum Incremental Motion
    0.08 µm
  • Closed Loop Minimum Incremental Motion
    0.30 µm
  • Push Force
    40 N
  • Pull Force
    40 N
  • Accuracy, Typical
    ±2.2 µm
  • Accuracy, Guaranteed
    ±5.0 µm
  • Bi-directional Repeatability, Typical
    ±0.30 µm
  • Bi-directional Repeatability, Guaranteed
    ±1.0 µm
  • Uni-directional Repeatability, Typical
    ±0.10 µm
  • Uni-directional Repeatability, Guaranteed
    ±0.25 µm
  • Origin Repeatability
    ±2 µm
  • Cable Length
    1.5 m  
  • Vacuum Compatibility
    10-6 Torr
  • Power Consumption
    6 W  
  • Weight
    0.35 kg  
  • MTBF
    10,000 h (25% load, 30% Duty cycle)
  • Maximum Power Consumption
    10 W
  • Compliance
    RoHS 3, CE
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Related Products

Compatible Controllers

Based on axis required, choose a specific controller to pair with the stage. Along with an XPS-D or XPS-RLD controller, a driver module is required.
Compare Description Drawings, CAD & Specs Avail. Price
XPS-RLD Universal High-Performance 1-4 Axis Motion Controller and DriverXPS-RLD Universal High-Performance 1-4 Axis Motion Controller and Driver1XPS-RLD Universal High-Performance 1-4 Axis Motion Controller and Driver
XPS-D Universal High-Performance 1-8 Axis Motion Controller and DriverXPS-D Universal High-Performance 1-8 Axis Motion Controller and Driver2XPS-D Universal High-Performance 1-8 Axis Motion Controller and Driver
ESP302 3-Axis Motion Controller and DriverESP302 3-Axis DC and Stepper Motion ControllerESP302 3-Axis DC and Stepper Motion Controller
SMC100 Single Axis Motion ControllerSMC100PP3Motion Controller, Single-axis Stepper Motor
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Notes:
  1. Requires XPS-DRV01 driver module. plug XPS-DRV01 to slots other than slot 1.
  2. Requires XPS-DRV01 driver module.
  3. Maximum Speed reduced to 40% of specified value above

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