MLT series compact, low profile, high precision linear stages bridges the ultra-precision performance of the XM family and the compact VP family of linear stages. The MLT-Z vertical stages maintain excellent positioning performance with a magnetic spring balancing system.
The MLT stages are ideal for typical scanning or point-to-point applications in semiconductor, industrial, or research markets for metrology, sensor test and calibration, alignment, and pick-and-place assembly.
| Models |
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|
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|---|---|---|---|
| Travel Range | 25 mm | 50 mm | |
| Minimum Incremental Motion | 5 nm | 5 nm | |
| Maximum Speed | 500 mm/s | 500 mm/s | |
| Maximum Acceleration | 0.5 g | 0.5 g | |
| Maximum Continuous Force | 3 N | 3 N | |
| Centered Load Capacity | 5 N | 5 N | |
| Accuracy, Guaranteed | ±0.5 µm | ±0.7 µm | |
| Bi-directional Repeatability, Guaranteed | ±0.15 µm | ±0.15 µm | |
| Pitch, Guaranteed | ±50 µrad | ±75 µrad | |
| Yaw, Guaranteed | ±50 µrad | ±75 µrad | |
| Flatness, Guaranteed | ±1 µm | ±2 µm | |
| Straightness, Guaranteed | ±1 µm | ±2 µm | |
| Drive Type | Ironless Motor | Ironless Motor | |
| Feedback | 1 Vpp 20 µm pitch | 1 Vpp 20 µm pitch | |
| Cable Length | 2.9 m | 2.9 m | |
| Weight | 3.0 kg | 3.2 kg | |
| Compliance | RoHS 3, CE | RoHS 3, CE |
Built with high strength aluminum alloy, the base of each MLT stage is optimized with Finite Element Method (FEM) for the highest rigidity and best thermal performance. Select components like long life and high load crossed roller bearings, high force linear motors and high precision linear encoders are added with not only performance, but also reliability in mind. Built in limit switches prevent over travel and collision. Significant tests were conducted to ensure the high reliability performance of the MLT.
MLT series stages are equipped with MKS designed ironless motors that include hall effect sensors and thermistor in a very compact size. Compared to iron core motors, the main advantage of ironless motors is better speed stability (no cogging) and shorter settling time, which is critical for fiber alignment applications.
MLT series compact, low profile and fast stages utilize less space, operate with higher accelerations and speeds, reducing operating costs. Also, due to their high reliability design they require low initial investment and need less maintenance.
The MLT series also offers linear translation stages with travel range from 25 mm to 250 mm. They can be built into XY stacks utilizing the available mounting holes. Pre-assembled XYZ stacks are available in the short travel 25 mm and 50 mm ranges.
The vertical stages come with 4 removable magnetic counter balance sheets to accommodate a range of vertical loads, while maintaining excellent positioning performance. The number of sheets in use depends on customer payload.
The MLT is compatible with XPS series standard MKS controllers that support plug and play ESP technology, making startup really easy without the need for complex driver configuration. (Note that for XY configurations, manual parameter setting is required.)
Compatible motion controllers for these XM series linear motor/direct drive driven stages are:
See our Stage-Controller Compatibility technical note for complete stages and controllers compatibility.
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