Wafer Positioning Stage, Integrated Vertical and DC Rotation Stage

ZVR Integrated Vertical and Rotation Stages

Newport’s new ZVR-PC is an integrated Z-vertical and DC Servo Theta-rotation positioning stage designed to precisely elevate and rotate 200 mm and/or 300 mm diameter wafer chucks. The ZVR-PC offers precise 10 mm vertical and continuous 360 degree angular travel in a very low profile design. Utilizing a DC Servo motor, and integrated rotary encoder in the theta stage, the ZVR-PC is capable of high speed, high performance positioning. With integrated vacuum and electrical lines accessed at a single point, and a three point mounting interface, the ZVR-PC offers convenient, stable, and high performance capability for applications such as wafer positioning. Please refer to the datasheet for the complete specifications on the rotational and vertical motion capabilities of the ZVR-PC.

Specifications

Technical Specs

Travel Range
10 mm
Angular Range
360°
Maximum Speed
80°/s
Maximum Linear Speed
10 mm/s
Minimum Incremental Motion
2.0 mdeg
Minimum Incremental Motion, Linear
0.05 µm
Maximum Torque
1 Nm
Centered Load Capacity
100 N
Uni-directional Repeatability, Typical
±0.50 mdeg, ±0.2 µm (linear)
Uni-directional Repeatability, Guaranteed
±1.5 mdeg, ±1.0 µm (linear)
Bi-directional Repeatability, Typical
±1.3 mdeg
Bi-directional Repeatability, Guaranteed
±3.0 mdeg
Bi-directional Repeatability, Linear
±1.2 (typical) ±2.0 (guaranteed) µm
Accuracy, Typical
Rotary: ±10 mdeg - Linear: ±0.5 µm

Accuracy, Guaranteed
Rotary: ±15 mdeg - Linear: ±2.0 µm
Wobble, Typical
±22 µrad
Wobble, Guaranteed
±40 µrad
Eccentricity, Typical
±2.2 µm
Eccentricity, Guaranteed
±4.0 µm
Origin Repeatability
Rotary: ±7.5 mdeg
Linear: ±2.5 µm
MTBF
20,000 h (25% load, 10% duty cycle)
Cable Length
3 m
Aperture Diameter
50 mm
Thread Type
M4
Weight
4.2 kg
Compliance
RoHS 3, CE

Travel Range
10 mm
Angular Range
360°
Maximum Speed
80°/s
Maximum Linear Speed
10 mm/s
Minimum Incremental Motion
2.0 mdeg
Minimum Incremental Motion, Linear
0.05 µm
Maximum Torque
1 Nm
Centered Load Capacity
100 N
Uni-directional Repeatability, Typical
±0.50 mdeg, ±0.2 µm (linear)
Uni-directional Repeatability, Guaranteed
±1.5 mdeg, ±1.0 µm (linear)
Bi-directional Repeatability, Typical
±1.3 mdeg
Bi-directional Repeatability, Guaranteed
±3.0 mdeg
Bi-directional Repeatability, Linear
±1.2 (typical) ±2.0 (guaranteed) µm
Accuracy, Typical
Rotary: ±10 mdeg - Linear: ±0.5 µm

Accuracy, Guaranteed
Rotary: ±15 mdeg - Linear: ±2.0 µm
Wobble, Typical
±22 µrad
Wobble, Guaranteed
±40 µrad
Eccentricity, Typical
±2.2 µm
Eccentricity, Guaranteed
±4.0 µm
Origin Repeatability
Rotary: ±7.5 mdeg
Linear: ±2.5 µm
MTBF
20,000 h (25% load, 10% duty cycle)
Cable Length
3 m
Aperture Diameter
50 mm
Thread Type
M4
Weight
4.2 kg
Compliance
RoHS 3, CE

Resources & Downloads

2D Product Drawings

ZVR-PC.pdf(586.6 kB, PDF)

Literature

ZVR Data Sheet(1.6 MB, PDF)

Manuals

ZVR User's Manual.pdf(2.6 MB, PDF)

Related Products

Compatible Controllers

Based on axis required, choose a specific controller to pair with the stage. Along with an XPS-D or XPS-RLD controller, a driver module is required.

	Compare	Description	Compatibility	Drawings, CAD & Specs	Avail.	Price
		xps-d-universal-motion-controller¹XPS-D Universal High-Performance 1-8 Axis Motion Controller and Driver	UNIVERSAL
		xps-rl-universal-high-performance-motion-controller²XPS-RLD Universal High-Performance 1-4 Axis Motion Controller and Driver	UNIVERSAL
		esp301-3-axis-dc-and-stepper-motion-controllerESP302 3-Axis DC and Stepper Motion Controller	UNIVERSAL
		smc100-single-axis-dc-or-stepper-motion-controller³SMC100 Single Axis Motion Controller	UNIVERSAL

Notes:

Requires XPS-DRV11 driver module
Requires XPS-DRV11 driver module
0.25 µm MIM for Z-axis when used with SMC100PP controller

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