Motorized Rotation Stage, High Speed, Low Profile
Motorized Rotation Stage, High Speed, Low Profile
Model: RGA150
10 Weeks
Product Series Overview
RGA Low Profile Large Aperture Direct Drive Rotation StagesThe RGA150 low-profile and large aperture rotary stage addresses the need for quick angle adjustments of wafers and vacuum chucks. Although specifically tailored to semiconductor applications, the RGA150 can also be utilized in other industrial applications, such as through hole imaging/inspection or laser processing, automation or any general positioning application that requires fast positioning.
Resources & Downloads
2D Product Drawings
RGA150 DWG.pdf(695.8 kB, PDF)
Literature
RGA150 Direct Drive Rotation Stage Datasheet(2.1 MB, PDF)
Other
RGA UKCA Declaration of Conformity.pdf(67 kB, PDF)
Technical Notes
Methods to Determine Optimized Scaling Acceleration(3.4 MB, PDF)
Manuals
RGA150 Rotation Stage User Manual(4.5 MB, PDF)
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