High Precision & Torque Rotation Stage, 360°, Brushless, No Cable, XPS-D/RL

The RGV100HL-S Compact Rotation Stage provides ultra-fast rotation, very high resolution, and outstanding positioning performance. Applications include semiconductor wafer inspection, micro-robotics, and precision metrology. Direct-drive technology eliminates the worm gear of traditional rotation stages providing higher speeds, superior reliability, and enhanced position sensitivity. Speed, resolution, and repeatability are increased by a factor of up to ten times. A high efficiency brushless DC torque motor with rare earth magnets supplies an optimum ratio of torque per inertia for high acceleration, with minimal stage heating. At maximum continuous torque, the temperature of the motor increases by only 30°C. Precision is ensured by a high-resolution glass scale with 15,000 line pairs per revolution that directly measures the position of the rotating platen. The flat encoder is mounted on a precision ground reference surface and is perfectly aligned with the stage’s rotation axis to minimize position errors induced by eccentricity, wobble, or axial runout. The RGV100HL features a proprietary 4-point contact ball bearing. This unique, 2-piece design minimizes the number of parts resulting in a more compact stage with superior stiffness, high reliability and outstanding wobble and eccentricity specifications. A 30 mm diameter through-hole allows easy routing of cables and vacuum lines through the stage. A once-per revolution index pulse permits precision homing to a unique home position. The RGV100HL also features two limit switches that can be enabled or disabled by an external switch.

Associated driver module and cable kit is required and must be purchased separately for all –S stages

Direct Drive, High Efficiency Motor

With direct-drive technology, the RGV series offers superior speeds and enhanced positioning. A high efficiency, brushless DC torque motor with rare earth magnets supplies an optimum ratio of torque per inertia for high acceleration. The non-contact direct-drive motor does not wear and introduces only minimal stage heating, with the temperature of the motor increasing by just 30°C at maximum continuous torque.  

Large Diameter Through Hole

RGV160BL Top View

A 30 mm or 110 mm diameter through-hole allows convenient routing of cables and vacuum lines through the stage.

Compact Design

A compact RGV Stage on the right, and an RV stage on the left.

The RGV series features a proprietary 4-point contact ball bearing and a 2-piece design which integrates multiple functions, like the bearing ways and the direct drive motor, minimizing the number of parts. The result is a more compact rotation stage with superior stiffness, high reliability and outstanding wobble and eccentricity specifications.

Metrology Report Included at No Additional Cost

Newport guarantees specification values which are measured and recorded following ASME B5.57 and ISO 230-2 standards. The typical performance values are two times better than the guaranteed specifications.