This product is only available on www.mks.com
Exhaust Throttle Valve, 1.888 in. ID, NW50 ISO-KF, Flapper O-ring
The 253B-2-50-1 Exhaust Throttle Valve regulates the removal of gas from a processing system. It features a 1.888 inch (48 mm) nominal inside diameter and a size NW50 ISO-KF Flange. A flapper O-ring is included. Its flapper is positioned to modulate gas flow, thereby controlling process pressure. The 253 has a patented non-linear actuator placed between the flapper shaft and the motor drive shaft in order to generate a linear valve transfer characteristic and provide smooth linear pressure control. The Type 253 is available in standard sizes and flange styles, and is compatible with all MKS throttle valve controllers.
Specifications
- TypeExhaust Throttle Valve
- Flange TypeISO-KF
- Flange SizeNW50
- Inner Diameter1.888 in. (48 mm)
- Valve DriveMechanical (non belt) drive with integral cosine generator
- Valve Speed7.5 s
- Resolution1/10,000
- Flapper O-ringYes
- Helium Leak Rate1 x 10-8 scc/sec
- Closed Leakage<10-7 (Torr l/s)
- Operating Temperature RangeValve Body: 0 - 90°C
Valve Motor: 0 - 70°C - Maximum Differential Pressure Across Valve1 Atmosphere