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253B Downstream Exhaust Throttle Valves

253B Downstream Exhaust Throttle Valves

253B Downstream Exhaust Throttle Valves

This product is only available on www.mks.com

Flapper is positioned to modulate gas flow
Patented non-linear actuator
Provides smooth linear pressure control

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Specifications

Type
Exhaust Throttle Valve
Valve Drive
Mechanical (non belt) drive with integral cosine generator
Valve Speed
7.5 s
Resolution
1/10,000

Helium Leak Rate
1 x 10-8 scc/sec
Operating Temperature Range
Valve Body: 0 - 90°C
Valve Motor:0 - 70°C
Maximum Differential Pressure Across Valve
1 Atmosphere