Air Bearing Solution Guide

Newport has the knowledge and expertise needed to address the most complex and demanding motion control applications. Whether your application requires the DynamYX® Datum™ capable of 5 G acceleration and nanometer accuracy, the evolutionary HybrYX® air and mechanical bearing “hybrid” stage or the newly released SinguLYS® that combines many of the advanced features of the previous models into a single axis solution, we have an Air Bearing Solution to meet your needs.

Air Bearing Positioning System Specification Comparison

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Air Bearing Positioning Solutions

  Model Markets Applications
DynamYX® DATUM® Ultra-High Performance Air Bearing Stage DynamYX® DATUM® Ultra-High Performance Air Bearing Stage Semiconductor and Microelectronics
  • Wafer Inspection
  • Optical Lithography
  • Nano Imprint Lithography
  • Memory Repair
CMS-DYNAMYX_GT-S DynamYX® GT High Throughput Air Bearing Stage Semiconductor and Microelectronics
  • Wafer Inspection
  • Optical Lithography
  • Nano Imprint Lithography
  • Memory Repair
  • Wafer Bump Inspection
DynamYX 300 DynamYX® 300 Wafer Positioning Air Bearing Stage
  • Semiconductor and Microelectronics
  • Electro Optics
  • Wafer Inspection
  • Optical Lithography
  • Nano Imprint Lithography
  • Memory Repair
  • Wafer Bump Inspection
  • Wave Guide Direct Writing
  • Optical Calibration
DynamYX RS DynamYX® RS Reticle Positioning Air Bearing Stage
  • Semiconductor and Microelectronics
  • Electro Optics
  • Reticle Inspection and Repair
  • Wave Guide Direct Writing
  • Optical Calibration
CMS-DynamYX-Hybrid HybrYX™ XY Hybrid Air Bearing XY Stage
  • Semiconductor and Microelectronics
  • Flat Panel Display
  • Photovoltaics
  • Electro Optics
  • Wafer Inspection
  • PCB Patterning
  • Wafer Bump Inspection
  • Automated Optical Inspection
  • Array Checking/Repair
  • Color Filter Generation
  • Edge Isolation
  • Scribing
  • Fiducial and Barcode Generation
  • Wave Guide Direct Writing
  • Optical Calibration
CMS-DynamYX G5 Maskless_1 HybrYX™ G5 Large Substrate Positioning Air Bearing Stage
  • Semiconductor and Microelectronics
  • Flat Panel Display
  • Photovoltaics
  • Electro Optics
  • PCB Patterning
  • Automated Optical Inspection
  • Array Checking
  • Array Repair
  • Color Filter Generation
  • Edge Isolation
  • Scribing
  • Fiducial and Barcode Generation
  • Wave Guide Direct Writing
  • Optical Calibration
SinguLYS_S-370 and B1200 SinguLYS™ Single Axis Air Bearing Stages
  • Semiconductor and Microelectronics
  • Flat Panel Display
  • Photovoltaics
  • Electro Optics
  • Ceramic (SiC) Construction Provides Low Mass, High Rigidity, and Excellent Thermal Stability
  • Integrated Pressure-Vacuum Air Bearings and Linear Motor Drive for Clean Operation
  • Compact Footprint With Self-Supporting Body and Three-Point Mounting
  • Standard Zerodur Linear Encoder provides High Accuracy and Repeatability (steel scale is optional)