Motorized Linear Stage, Linear Motor, 350 mm Travel, 300 N Load, M4 and M6

XM stages are ideal for applications such as laser micromachining, marking, cutting, and nano-patterning. This video shows two XM stages stacked in a 2-axis (XY) system driven by a Newport XPS controller for complex, smooth, ultra high precision motion synchronized with a galvo scanner.

XM Series direct drive stages provide ultra high precision motion for the most demanding applications. This video shows an assembly of two XM stages and one XMS-V vertical stage providing 3 axes (XYZ) of motion which could be used for applications such as focusing, sensor test/calibration, direct laser lithography, and precision assembly.

The ultra precision design and Heidenhain glass linear scale make the XM linear stage series capable of consistent commanded 1 nm MIM in a controlled environment.

Unlike screw-driven stages, the XM employs a center-driven, ironless linear motor as the driving element. Since the linear motor is a frictionless direct drive device, there is no backlash or hysteresis, wind-up or stiction limiting the motion performance. The linear motor drive also offers the advantage of higher speed, acceleration and system responsiveness with no wear to motor brushes or drive screws. The extra-large, ironless motor coil ensures zero cogging for ultra smooth velocity control and provides higher efficiency compared to alternative stage designs. This results in significantly less heat generation, which is generally the main limit for ultra-precision motion applications. To further improve thermal management and its effect on stage performance, the XM also has the benefit of a sophisticated length decoupling of the magnetic track from the stage carriage.

To ensure the most accurate trajectory control, XM stages feature matched pairs of best-in-class anti-creep crossed roller bearings. The absence of recirculating elements in these bearings leads to outstanding ripple-free motion adequate for the most demanding scanning and inspection systems. In addition, the geared retainers prevent bearing cage migration, which can occur with other linear bearing products.

The T-shaped carriage used on the XM provides the optimum solution for precision XY assemblies without impacting the stage preload. It is also more robust and tolerant to non-ideal mounting conditions than stages with a C-shaped carriage design.