Motorized Linear Stage, Linear Motor, 350 mm Travel, 300 N Load, M4 and M6

XM Ultra-Precision Aluminum Linear Motor Stages

The XML350-S Ultra-Performance Linear Stage delivers world-leading dynamic performance capable of consistent, reliable motion to 1 nm with a travel range of 350mm. Innovative and compact; XM stages provide robust, repeatable motion with outstanding accuracy on the most complex trajectories. Featuring, precision engineered components and design that minimizes both wear and motor heating, XM performance maximizes your motion investment for the long-term. XM stages are an ultra-high-performance solution for applications such as laser machining, semiconductor wafer process, sensor test and calibration, ultra-precision assembly and other scanning applications requiring excellent dynamic response.

The XMS-S stage line is intended to be used with the XPS-D controller. Associated driver module and cable kit is required and must be purchased separately for all –S stages (see Accessories section below).

Ideal for Laser Processing Applications

XM stages are ideal for applications such as laser micromachining, marking, cutting, and nano-patterning. This video shows two XM stages stacked in a 2-axis (XY) system driven by a Newport XPS controller for complex, smooth, ultra high precision motion synchronized with a galvo scanner.

Ultra-Precision in 3 Axes

XM Series direct drive stages provide ultra high precision motion for the most demanding applications. This video shows an assembly of two XM stages and one XMS-V vertical stage providing 3 axes (XYZ) of motion which could be used for applications such as focusing, sensor test/calibration, direct laser lithography, and precision assembly.

Command 1 nm Motion Steps

The ultra precision design and Heidenhain glass linear scale make the XM linear stage series capable of consistent commanded 1 nm MIM in a controlled environment.

XM-S Stages are capable of 1-nm incremental motion in a controlled environment using an XPS-D controller.

Innovative Center-Driven, Ironless, Direct Drive Linear Motor

Unlike screw-driven stages, the XM employs a center-driven, ironless linear motor as the driving element. Since the linear motor is a frictionless direct drive device, there is no backlash or hysteresis, wind-up or stiction limiting the motion performance. The linear motor drive also offers the advantage of higher speed, acceleration and system responsiveness with no wear to motor brushes or drive screws. The extra-large, ironless motor coil ensures zero cogging for ultra smooth velocity control and provides higher efficiency compared to alternative stage designs. This results in significantly less heat generation, which is generally the main limit for ultra-precision motion applications. To further improve thermal management and its effect on stage performance, the XM also has the benefit of a sophisticated length decoupling of the magnetic track from the stage carriage.

XM stages provide exceptional speed stability in continuous scanning or laser machining applications. Shown is the speed of an XMS50 gathered at a rate of 1 kHz using an interferometer.

Matched Pairs of Anti-creep Crossed Roller Bearings for Ultra-Accuracy

To ensure the most accurate trajectory control, XM stages feature matched pairs of best-in-class anti-creep crossed roller bearings. The absence of recirculating elements in these bearings leads to outstanding ripple-free motion adequate for the most demanding scanning and inspection systems. In addition, the geared retainers prevent bearing cage migration, which can occur with other linear bearing products.

Accuracy of a XMS50-S stage after linear error correction, measured dynamically at a 10-KHz rate while the stage was moving at a 100 mm/s speed.

T-Shaped Carriage Design for Optimum XY Assemblies

The T-shaped carriage used on the XM provides the optimum solution for precision XY assemblies without impacting the stage preload. It is also more robust and tolerant to non-ideal mounting conditions than stages with a C-shaped carriage design.

Specifications

Technical Specs

Travel Range
350 mm
Maximum Speed
300 mm/s
Minimum Incremental Motion ⁰
1 nm
Continuous Motor Force
37 N
Peak Motor Force
240 N
Centered Load Capacity
300 N
Accuracy, Typical
±0.5 µm
Accuracy, Guaranteed
±1.5 µm
Bi-directional Repeatability, Typical
±0.035 µm
Bi-directional Repeatability, Guaranteed
±0.040 µm
Flatness Typical (Guaranteed)
±0.75 (±1.50) µm
Straightness Typical (Guaranteed)
±0.75 (±1.50) µm
Pitch, Typical
±20 µrad
Pitch, Guaranteed
±50 µrad

Compliance in Pitch
0.7 µrad/Nm
Yaw, Typical
±10 µrad
Yaw, Guaranteed
±40 µrad
Compliance in Yaw
0.2 µrad/Nm
Compliance in Roll
0.1 µrad/Nm
Drive Type
Linear Motor
Origin Repeatability
±0.025 µm
Thread Type
M4 and M6
Weight
22 kg
MTBF
20,000 h (25% load, 30% duty cycle)
Maximum Power Consumption
100 W
Compliance
RoHS 3, CE

Notes:

Requires operation in controlled environment to achieve specification.

Travel Range
350 mm
Maximum Speed
300 mm/s
Minimum Incremental Motion ⁰
1 nm
Continuous Motor Force
37 N
Peak Motor Force
240 N
Centered Load Capacity
300 N
Accuracy, Typical
±0.5 µm
Accuracy, Guaranteed
±1.5 µm
Bi-directional Repeatability, Typical
±0.035 µm
Bi-directional Repeatability, Guaranteed
±0.040 µm
Flatness Typical (Guaranteed)
±0.75 (±1.50) µm
Straightness Typical (Guaranteed)
±0.75 (±1.50) µm
Pitch, Typical
±20 µrad
Pitch, Guaranteed
±50 µrad

Compliance in Pitch
0.7 µrad/Nm
Yaw, Typical
±10 µrad
Yaw, Guaranteed
±40 µrad
Compliance in Yaw
0.2 µrad/Nm
Compliance in Roll
0.1 µrad/Nm
Drive Type
Linear Motor
Origin Repeatability
±0.025 µm
Thread Type
M4 and M6
Weight
22 kg
MTBF
20,000 h (25% load, 30% duty cycle)
Maximum Power Consumption
100 W
Compliance
RoHS 3, CE

Notes:

Requires operation in controlled environment to achieve specification.

Resources & Downloads

2D Product Drawings

XML350-S(470 kB, PDF)

Manuals

XM-S Linear Motor Stages User's Manual(1.6 MB, PDF)
Cable Kits User's Manual.pdf(1.9 MB, PDF)

Related Products

Compatible controllers

Based on axis required, choose a specific XPS-D or XPS-RLD controller to pair with the stage.
Along with the controller, a driver module and a cable kit are required. See the options below.

	Compare	Description	Compatibility	Drawings, CAD & Specs	Avail.	Price
		XPS-D Universal High-Performance 1-8 Axis Motion Controller and DriverXPS-D Universal High-Performance 1-8 Axis Motion Controller and Driver	UNIVERSAL
		XPS-RLD Universal High-Performance 1-4 Axis Motion Controller and DriverXPS-RLD Universal High-Performance 1-4 Axis Motion Controller and Driver	UNIVERSAL

Universal XPS-DRV11 driver

	Compare	Description	Compatibility	Drawings, CAD & Specs	Avail.	Price
		XPS-DRV11Motion Controller Card, Universal, Stepper, DC, and Linear Motors	UNIVERSAL		In Stock FREE 2-day shipping on thousands of products on Newport.com Learn More	$865
		XPS-DK22Cable Kit, For Stages IMS-LM-S, XM-S, and XPS-DRV11 Driver	UNIVERSAL		In Stock	$493

Legacy XPS-DRV02 driver

	Compare	Description	Compatibility	Drawings, CAD & Specs	Avail.	Price
		XPS-DRV02PWM Drive Module, Brushless Motors	UNIVERSAL		In Stock	$1,353
		XPS-DK27Cable Kit, For Stages IMS-LM-S, XM-S, and XPS-DRV02 Driver	UNIVERSAL		Contact Us	$454

Similar Stages

	Compare	Description	Compatibility	Drawings, CAD & Specs	Avail.	Price
		IMS300CCHAMotorized Linear Stage, 300 mm Travel, DC Motor, Linear Encoder, 1/4-20	IMPERIAL		8 Weeks	$12,808
		IMS400CCHAMotorized Linear Stage, 400 mm Travel, DC Motor, Linear Encoder, 1/4-20	IMPERIAL		8 Weeks	$12,831

Frequently Purchased Together

	Compare	Description	Compatibility	Drawings, CAD & Specs	Avail.	Price
		XPS-DK22Cable Kit, For Stages IMS-LM-S, XM-S, and XPS-DRV11 Driver	UNIVERSAL		In Stock	$493
		XPS-DRV11Motion Controller Card, Universal, Stepper, DC, and Linear Motors	UNIVERSAL		In Stock FREE 2-day shipping on thousands of products on Newport.com Learn More	$865

Motorized Linear Stage, Linear Motor, 350 mm Travel, 300 N Load, M4 and M6

Model: XML350-S

Product Series Overview

Ideal for Laser Processing Applications

Ultra-Precision in 3 Axes

Command 1 nm Motion Steps

Innovative Center-Driven, Ironless, Direct Drive Linear Motor

Matched Pairs of Anti-creep Crossed Roller Bearings for Ultra-Accuracy

T-Shaped Carriage Design for Optimum XY Assemblies

Specifications

Technical Specs

Notes:

Notes:

Resources & Downloads

3D Product Models

Application Notes

Literature

Technical Notes

2D Product Drawings

Manuals

Related Products

Compatible controllers

Universal XPS-DRV11 driver

Legacy XPS-DRV02 driver

Similar Stages

Frequently Purchased Together