Piezo XY Linear Stage, 200 µm Nanopositioning, Strain-gauge

Specifications

  • Travel Range
    0.2 mm  
  • Axes of Travel
    XY
  • Axial Load Capacity
    40/40 N
  • Vertical Load Capacity
    100 N  
  • Axial Stiffness
    0.65 N/μm / 0.652 N/µm
  • Feedback
    Strain-gauge
  • Cable Length
    2 m
  • Capacitance
    5.2 µF  
  • Closed Loop Resolution
    4 nm  
  • Closed Loop Travel
    160 µm  
  • Open Loop Resolution
    0.4 nm  
  • Open Loop Travel
    200 µm  
  • Resonant Frequency, Unloaded
    350/350 Hz
  • Weight
    350 g  
  • RoHS
    Compliant

Resources & Downloads

3D Product Models
Literature
2D Product Drawings

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