Piezo Actuator, Vacuum, 0.1 mm Travel Range, Strain-gauge
Piezo Actuator, Vacuum, 0.1 mm Travel Range, Strain-gauge
Model: NPA100SGV6
Product Series Overview
Vacuum Compatible Piezo Stack ActuatorsThe NPA100SGV6 Vacuum Compatible Nano-Positioning Piezo Actuator is ideally suited for integration into custom motion devices. It provides nanometer resolution over a 100 µm travel range with micro-second response time in a very compact housing. NPA series actuators can generate large forces up to 1000 N which makes them particularly useful for machine tools, active vibration isolation or adaptive mechanics. Their small size and high resonant frequency are suitable for scanning microscopy, laser tuning and beam steering, patch clamping or micro lithography applications. This closed-loop version features a high resolution strain-gauge position sensor for highly accurate and repeatable motion. Also, the position feedback compensates for actuator creep. The assembly is done as a full Wheatstone bridge and is temperature insensitive. The closed-loop devices can be used in either open or closed-loop control. Fastening is accomplished by M3-threads at the top and the base of the piezoelectric actuator. Like all piezoelectric devices, moment loads and side forces should be avoided. Spanner flats are provided and should be used when securing screws. Vacuum compatible to 10-6 Torr.
Use with the NPC3SG Nanopositioning Amplifier.
Use with the NPC3SG Nanopositioning Amplifier.
Specifications
- Travel Range0.1 mm
- Axial Load Capacity1000 N
- Load Capacity, Pull150 N
- Axial Stiffness10 N/µm
- Capacitance9.0 µF
- Resonant Frequency3000 Hz
- Closed Loop Repeatability28 nm
- Closed Loop Resolution2.0 nm
- Open Loop Resolution0.2 nm
- Closed Loop Travel Range80 µm
- Vacuum Compatibility10-6 Torr
- Cable Length2 m
Resources & Downloads
3D Product Models
Literature
NPA Data Sheet(1.1 MB, PDF) Vaccum Compatible Products Brochure(3.8 MB, PDF)
2D Product Drawings
NPA Series-S(97.9 kB, PDF)
Manuals
NanoPositioning NPX & PSM User's Manual(139.7 kB, PDF)
Technical Notes
Resonant Frequency Tech Note(78.4 kB, PDF)
Related Products
Compatible
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | NPC3SGPiezo Stack Amplifier, 3 Channel, Strain-Gauge Position Control |
