The 390511-3-YG-T Micro-Ion® ATM Vacuum Gauge Module features 1x10^-9 Torr to Atmosphere pressure measurement, a 2.75-inch (NW35CF) ConFlat-type flange fitting, and RS485/Analog communications. A digital display for local pressure readings is included. Three set point control relays are included to simplify process control functions. It has Yttria-coated iridium ionization gauge filaments and Torr measurement units. It combines proven Micro-Ion® ionization vacuum gauge technology with a miniature Conductron® heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, the 390 Micro-Ion® ATM Micro-Ion®/Conductron®/Piezo Vacuum Gauge Module is capable of providing accurate absolute pressure up to Atmosphere along with precise indication of vacuum chamber differential pressure from ambient. The unique vacuum sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. The small 390 Micro-Ion® ATM combines all four sensors and control electronics in a compact modular design, reducing the number of gauges required on a chamber and minimizing the required space.