Vacuum Compatible Linear Stages
Vacuum Linear Stages
Newport vacuum compatible linear translation stages offer excellent motion performance. Each linear stage is built, treated and tested under vacuum to 10-6 hPa (7.5*10-7 Torr). With a wide vacuum compatible linear stage selection from nanopositioners to micropositioners, Newport vacuum compatible linear stages can address the translation needs of the most demanding vacuum motion applications.
Newport has the capability to prepare stages and motion systems not listed here for application in vacuum environments. Check out our Environmental Preparation technical notes. To discuss your application specific motion requirements, contact us online or call 877-835-9620.
Vacuum Compatible Linear Stages
| Series | Travel Range (mm) |
Minimum Incremental Motion (µm) |
Normal Load Capacity (N) |
Maximum Speed (mm/s) |
|
|---|---|---|---|---|---|
 |
MTN Series Vacuum Stages MTN100PPV6 MTN200PPV6 MTN300PPV6 |
100-300 | 0.4 | 1000 | 20 |
 |
UTS Series Vacuum Linear Stages UTS50PPV6 UTS100PPV6 UTS150PPV6 |
50-150 | 0.3 | 100 | 20-40 |
 |
MFA Miniature Vacuum Linear Stages MFA-CCV6 |
25 | 0.1 | 50 | 1.25 |
 |
Agilis Series Vacuum Linear Stages AG-LS25V6 AG-LS25-27V6 |
12, 27 | 0.05 | 3 | 0.5 |
 |
NPX Vacuum Linear Stages NPX-V6 |
0.1-0.4 | 0.0002-0.008 | 10-100 | See Specifications |
 |
Manual Vacuum Linear Stages 9066-V 9067-V |
12.7, 25.4 | Actuator dependent | 111, 222 | Actuator dependent |