Air Bearing Solution Guide
Newport has the knowledge and expertise needed to address the most complex and demanding motion control applications. Whether your application requires the DynamYX® Datum™ capable of 5 G acceleration and nanometer accuracy, the evolutionary HybrYX® air and mechanical bearing “hybrid” stage or the newly released SinguLYS® that combines many of the advanced features of the previous models into a single axis solution, we have an Air Bearing Solution to meet your needs.
Air Bearing Positioning System Specification Comparison
Air Bearing Positioning Solutions
| Model | Markets | Applications | |
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DynamYX® DATUM® Ultra-High Performance Air Bearing Stage | Semiconductor and Microelectronics |
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DynamYX® GT High Throughput Air Bearing Stage | Semiconductor and Microelectronics |
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DynamYX® 300 Wafer Positioning Air Bearing Stage |
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DynamYX® RS Reticle Positioning Air Bearing Stage |
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HybrYX™ XY Hybrid Air Bearing XY Stage |
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HybrYX™ G5 Large Substrate Positioning Air Bearing Stage |
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SinguLYS™ Single Axis Air Bearing Stages |
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