The 100007131 Main Valve Internals are for two-stage vacuum valves with a size NW40 Port and include Viton seals.
100007131 is compatible with these MKS valves:
| 170-0040K | 172-0040K | 172-1040K | 173-0040K-120V/50-60 |
| 173-0040K-24VDC | 173-1040K-100V/50 | 173-1040K-120V/50-60 | 173-1040K-208V/50-60 |
| 173-1040K-220V/50-60 | 173-1040K-24V/50-60 | 173-1040K-24VDC | 173-1040T-24VDC |
| 180-0040K | 182-0040K | 182-1040K | 183-0040K-120V/50-60 |
| 183-0040K-24V/50-60 | 183-0040K-24VDC | 183-1040K-100V/50 | 183-1040K-120V/50-60 |
| 183-1040K-208V/50-60 | 183-1040K-220V/50-60 | 183-1040K-24V/50-60 | 183-1040K-24VDC |
| V2-040-AC-063-MLVNH-120 | V2-040-AC-225-CLVNH-24D | V2-040-AC-225-CNVNH-24D | V2-040-AC-225-MLVNH-24D |
| V2-040-AC-225-VLVNH | V2-040-AC-225-VLVNH-120 | V2-040-AC-225-VLVNH-12D | V2-040-AC-225-VNVNH |
| V2-040-AC-225-VNVNH-120 | V2-040-AK-063-CLVNH-24A | V2-040-AK-063-CNVHA | V2-040-AK-063-CNVNH |
| V2-040-AK-225-CLVHA-24D | V2-040-AK-225-CLVNH | V2-040-AK-225-CLVNH-24D | V2-040-AK-225-CNVHA-T25 |
| V2-040-AK-225-CNVNH | V2-040-AK-225-CNVNH-24D | V2-040-AK-225-MNVNH | V2-040-AK-225-MNVNH-24D |
| V2-040-AK-225-VLVNH | V2-040-AK-225-VLVNH-24D | V2-040-AK-225-VNVNH | V2-040-AK-225-VNVNH-120 |
| V2-040-AK-225-VNVNH-12D | V2-040-AK-225-VNVNH-240 | V2-040-AK-225-VNVNH-24A | V2-040-IC-225-CLVNH-24D |
| V2-040-IC-225-MNVNH-24D | V2-040-IK-125-CNVNH | V2-040-IK-225-CLVNH | V2-040-IK-225-CLVNH-24D |
| V2-040-IK-225-CNVNH | V2-040-IK-225-CNVNH-120 | V2-040-IK-225-VLVNH | V2-040-IK-225-VLVNH-F12 |
| V2-040-IK-225-VNVNH |
Ultra-High Velocity Learn More
