Compare Description Drawings, CAD & Specs Avail. Price
Agilis™ Piezo Motor Linear StagesAG-LS25Piezo Linear Stage, 12 mm travel
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$925
Agilis™ Piezo Motor Linear StagesAG-LS25-27Piezo Linear Stage, 27 mm travel
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$1,305
Agilis™ Piezo Motor Linear StagesAG-LS25V6Piezo Linear Stage, 12 mm travel, Vacuum Compatible
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$1,371
Agilis™ Piezo Motor Linear StagesAG-LS25-27V6Piezo Linear Stage, 27 mm travel, Vacuum Compatible
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$1,818

Specifications

Features

Multi-Axis Stage Configurations

Agilis™ piezo motor linear stages can be configured as XY, XZ, or XYZ stage stacks. You can use the , 90 degree angle bracket for building XZ and XYZ stage configurations. Attention this bracket is not compatible with the AG-LS25-27 (as Z-axis).  For XY stage assemblies of AG-LS25 stages, use the 4 x TC M3x4 screws supplied with each stage. The AG-LS25-27 & AG-LS25-27V6 must be positioned at the bottom of the stack (X-axis). The AG-LS25 & AG-LS25V6 stages can be stacked on top of the AG-LS25-27(V6) as the Y-axis, or as the Z-axis using the 339233, 90 degree angle bracket. Please note that the 339233, 90 degree angle bracket, is anodized and not vacuum compatible. An XZ stage stack is shown.

Integrated Linear Encoder with CONEX Controller Version

Newport also offers a version of the 27-mm travel Agilis linear stage with a built-in direct read linear encoder and integrated CONEX controller, the . Its closed-loop control provides a typical bi-directional repeatability of 0.2 µm and 0.2 µm minimum incremental motion.

50 nm Minimum Incremental Motion

The Agilis proprietary piezo technology provides 50 nm incremental motion capability, making them ideal for ultra-sensitive alignments and adjustments.

Vacuum Compatible Versions

The Agilis linear stages are available in vacuum compatible versions which can be used in vacuum (10-6 Torr) environments.

Set-and-Forget Long-Term Stability

The Agilis piezo motor is directly coupled to the moving carriage with no intermediate screw or gear, avoiding problems with coupling in drivetrain. When idle, the holding force of the motor locks the position for true set-and-forget long-term stability.

Ripple-Free and Low Friction Travel

The thermally matched stainless steel design and precision manufactured bearing surfaces of the Agilis linear stage provide ripple-free, low friction linear travel and angular deviations better than 100 µrad in any axis.

Accessories

Agilis Controllers

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AG-UC2Motor Controller, Piezo, 2 Axis, Agilis™, Hand-held
$598
AG-UC8Motor Controller, Piezo, 8 Axis, Agilis™
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$1,098
AG-UC8PCMotor Controller, Piezo, 8-Axis, Agilis™, OEM, USB/RS232/RS485
$1,006

Agilis Accessories

Compare Description Drawings, CAD & Specs Avail. Price
339233Angle Bracket, 90 Degree, Closed Corner, UMR3 Stages, EQ3.02
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$106
B-2BAdaptor Plate, 25x25 or 40x40 mm Stage to Optical Table or 65x65 mm Stage
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$49
M-B-1.25Adaptor Plate, 25x25 mm Stage to 40x40 mm Stage
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$57
M-B-2CAdaptor Plate, 25x25 mm Stage to Optical Table or 65x65 mm Stage
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$57