Vacuum compatible crossed roller bearing stages are clean assembled and made with low vapor pressure grease appropriate for use in vacuum pressures as low as down to 10^-6 Torr. 9066 and 9067 versions are also available without a baseplate for easier integration into the volume restrictions typical of vacuum systems.

These vacuum compatible, crossed-roller translation stages provide low profile, yet solid and sturdy linear translation. Like their standard versions, the weight load rests on the actuators of the stages to support load capacities up to 50 lb. in both horizontal and vertical orientations (including the X-configured stage), and can be locked in place. This also allows for the high load capacity of up to 50 lb. The micron-scale travel precision typically needed is achieved with an angular deviation of <150 µrad and straight-line accuracy better than 3 microns.

These stages come in mirror-image right and left-hand versions for more flexibility in how you lay out your experiment on the table, so there's never a need to reach over your work to make adjustments on the far side. 

We offer low profile -COM commercial versions of these stages designed to fit directly into your system. They not include the mounting base plate for reduced height and lower cost.