HybrYX® Hybrid Air Bearing XY Stages
HybrYX® Hybrid Air Bearing XY Stages
The HybrYX® single plane XY hybrid stages are the latest addition to our air bearing products offering the advantages of a single plane air bearing stage at a much lower cost than previously possible. HybrYX is well suited for semiconductor wafer inspection systems as well as being an excellent choice for use in large substrate inspection and processing tools.
- Excellent price-to-performance value for demanding industrial OEM applications
- Great for scanning applications requiring ultra-low velocity ripple & dynamic following error
- True single plane XY architecture with optional theta and Z-Tip-Tilt solutions
- Reliable, long-life operation well suited for high duty cycle environments
- Large (>1 meter) XY Travel range
- Scanning velocities up to 600mm/sec and 0.6 g acceleration See All Features
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | HybrYXHybrid Air Bearing Stage, Single Plane XY |
Specifications
- Pitch15 µrad
- Surface Flatness0.6 µm
- Travel Range350 mm
- Travel Range Y650 mm
Features
Newport Air Bearing Stage Solutions
Newport's reputation for being the premier supplier of high-precision motorized staes is exemplified by our full line of Air Bearing Positioning Systems. Additionaly, our dedicated OEM group has the knowledge and expertise needed to address the most complex and demanding motion control applications. This video provides an overview of the DynamYX, HybrYX and SinguLYS air bearing stage solutions.
Innovative Architecture
HybrYX stages blend the cost-effectiveness of mechanical bearings with the precision of a single plane air bearing carriage to deliver a powerful combination of throughput, precision and value. During motion, a ceramic carriage freely slides in X and Y on a precision lapped granite reference plane using a proprietary pressure-vacuum air bearing design. This XY carriage is pressure-vacuum preloaded to, and guided along the Y-axis by a rigid and lightweight ceramic beam. The beam is supported (and guided) at each end by recirculating ball bearing carriages resulting in a low-profile design that is extremely rigid, well-damped, and capable of quick & precise point-to-point moves and exceptional high-speed scanning performance. For large payloads, such as Generation-5 LCD display or Photovoltaic panels, the HybrYX-G5 offers an oversized carriage with higher air bearing load capacity on both the horizontal and vertical reference surfaces.
Outstanding Performance Characteristics for Demanding Scanning Applications
Performance without Compromise
The HybrYX Stage Applications
- Wafer Inspection
- PCB Patterning
- Wafer Bump Inspection
- Automated Optical Inspection
- Array Checking
- Array Repair
- Color Filter Generation
- Edge Isolation
- Scribing
- Fiducial and Barcode Generation
- Wave Guide Direct Writing
- Optical Calibration
Resources
Literature
Technical Articles
Bringing Hybrid Bonding Into Production(1.9 MB, PDF)
