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Ultra High Vacuum Isolation Valves
Ultra High Vacuum Isolation Valves
This product is only available on www.mks.com
- Metal bonnet seal limits outgassing and permeation for a lower base pressure
- High purity, corrosion resistant, 304 stainless steel body
- Surface finish options of electropolish or bead blast
- Spring-to-close, air-to-open pneumatic valve See All Features
Specifications
- TypeUHV Isolation Valve
- Flange TypeCF
- Flange Size2 3/4 inch
- Vacuum Range10-9 to Atmosphere
- Seal MaterialViton
- Nose Seal MaterialViton
- Bonnet Seal MaterialCopper