precision-vertical-stages-vp-series

Precision Vertical Stages, VP Series

Specifications

Technical Specs

Travel Range
4.8 mm
Minimum Incremental Motion
60 nm
Maximum Speed
5 mm/s
Centered Load Capacity
50 N
Accuracy, Typical
±0.6 µm
Accuracy, Guaranteed
±1.5 µm
Bi-directional Repeatability, Typical
±0.10 µm
Bi-directional Repeatability, Guaranteed
±0.25 µm
Uni-directional Repeatability, Typical
±0.06 µm
Uni-directional Repeatability, Guaranteed
±0.15 µm
Drive Screw Pitch
1 mm
Reduction Gear
5:1
Encoder Resolution
0.0196 µm
Limit Switches
Optical
Origin
Optical, centered
Origin Repeatability
±0.1 µm
Connectors
DB25 Male

Pitch, Typical
±30 µrad
Pitch, Guaranteed
±50 µrad
Compliance in Pitch
45 µrad/Nm
Roll, Typical
±30 µrad
Roll, Guaranteed
±100 µrad
Compliance in Roll
50 µrad/Nm
Yaw, Typical
±30 µrad
Yaw, Guaranteed
±50 µrad
Compliance in Yaw
10 µrad/Nm
Cable Length
1.5 m
Thread Type
4-40 and 8-32 or M3 and M4 (M- version)
Weight
2.4 kg
MTBF
20,000 h (25% load, 10% duty cycle)
RoHS
Compliant

Travel Range
4.8 mm
Minimum Incremental Motion
60 nm
Maximum Speed
5 mm/s
Centered Load Capacity
50 N
Accuracy, Typical
±0.6 µm
Accuracy, Guaranteed
±1.5 µm
Bi-directional Repeatability, Typical
±0.10 µm
Bi-directional Repeatability, Guaranteed
±0.25 µm
Uni-directional Repeatability, Typical
±0.06 µm
Uni-directional Repeatability, Guaranteed
±0.15 µm
Drive Screw Pitch
1 mm
Reduction Gear
5:1
Encoder Resolution
0.0196 µm
Limit Switches
Optical
Origin
Optical, centered
Origin Repeatability
±0.1 µm
Connectors
DB25 Male

Pitch, Typical
±30 µrad
Pitch, Guaranteed
±50 µrad
Compliance in Pitch
45 µrad/Nm
Roll, Typical
±30 µrad
Roll, Guaranteed
±100 µrad
Compliance in Roll
50 µrad/Nm
Yaw, Typical
±30 µrad
Yaw, Guaranteed
±50 µrad
Compliance in Yaw
10 µrad/Nm
Cable Length
1.5 m
Thread Type
4-40 and 8-32 or M3 and M4 (M- version)
Weight
2.4 kg
MTBF
20,000 h (25% load, 10% duty cycle)
RoHS
Compliant

Resources & Downloads

Application Notes

Three-Dimensional Microfabrication by Two-Photon Polymerization(932.1 kB, PDF)
Building a High Performance Non-contact Optical Surface Metrology System(400.4 kB, PDF)
Workstation for Laser Direct-Write Processing(4.4 MB, PDF)
A Diamond in the Rough: Industrial Diamond Cutting and Processing with a 4-Axis Precision Motion System(517.1 kB, PDF)

Manuals

VP-5ZA Vertical Linear Stage User's Manual(1.5 MB, PDF)

Literature

VP-5ZA Data Sheet.pdf(1.7 MB, PDF)

Technical Notes

Stage and Controller Compatibility Guide

Related Products

Mounting

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