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Products
Motion Control
Advanced Motion Systems
Hybrid Air Bearing Multi-Axis Systems
HybrYX
®
G5 Large Substrate Positioning Stage
HybrYX
®
G5 Large Substrate Positioning Stage
Model:
hybryx-g5-large-substrate-positioning-stage
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Product Series Overview
Specifications
Technical Specs
Travel Range
350 mm
Travel Range Y
650 mm
Travel Range
350 mm
Travel Range Y
650 mm
Resources & Downloads
Literature
High Performance Air Bearing Stage Capabilities and Solutions
(11.9 MB, PDF)
