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Series 145 Vacuum Sentry Pump Failure Safety Valves
Series 145 Vacuum Sentry Pump Failure Safety Valves
This product is only available on www.mks.com
- Protects vacuum system from oil backstreaming in the event of power failure
- Enables quick system restarts by venting the pump to atmosphere
- Operates up to 100,000 cycles
- No external pressurized gas source required See All Features
Specifications
- TypePump Failure Safety Valve
- ConfigurationAngle Ports
- Flange TypeISO-KF
- Body MaterialAL 6061-T6
- Piston MaterialAL 2024
- Seal MaterialViton
- Guide Pin MaterialViton
- Helium Leak Rate<1 x 10-9 std cc/sec
- Venting Time10 s/l of vented volume
- Closing Time30 ms
- Closing Burst1 x 10-3 T-1
- Operating Temperature RangeValve: 0 - 100°C
Solenoid: 0 - 55°C