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153D Exhaust Throttle Valves with Integrated Controller

153d smart exhaust throttle valve with integrated controller

Overview

The 153D "Smart" Exhaust Throttle Valve integrates all control, communication, and driver circuits via a compact "add-on" electronics module within a 253 Throttle Valve assembly, eliminating the need for a separate pressure control electronics module. The 153 is operable in two modes, flapper positioning or pressure control.

Please see 153D Throttle Valves on mks.com for additional configurations.

Flapper positioning or pressure control modes
Integrated control and driver circuits
253 throttle valve assembly

Specifications

Type

Smart Exhaust Throttle Valve
Valve Drive

Mechanical (non belt) drive with integral cosine generator to linearize valve transfer characteristic
Valve Speed

7.5 s
Resolution

1/10,000

Helium Leak Rate

1 x 10^-8 scc/sec
Closed Leakage

<10^-7 (Torr l/s)
Operating Temperature Range

Valve Motor: 0 - 70°C
Valve Body: 0 - 90°C
Maximum Differential Pressure Across Valve

1 Atmosphere (15 psig)

Specifications

Type

Smart Exhaust Throttle Valve
Valve Drive

Mechanical (non belt) drive with integral cosine generator to linearize valve transfer characteristic
Valve Speed

7.5 s
Resolution

1/10,000

Helium Leak Rate

1 x 10^-8 scc/sec
Closed Leakage

<10^-7 (Torr l/s)
Operating Temperature Range

Valve Motor: 0 - 70°C
Valve Body: 0 - 90°C
Maximum Differential Pressure Across Valve

1 Atmosphere (15 psig)

Product Comparison

153D Exhaust Throttle Valves with Integrated Controller

153D Exhaust Throttle Valves with Integrated Controller

Overview

Specifications

Specifications